Electrostatic Chucks (ESC)

Application
Electro-static chucks are used for ETCH, CVD, and ion implantation systems.

Material
Alumina. Contact NTK Technologies for more details.

Features
Electro-static chucks are made of bulk ceramics and have high resistance to plasma and process gas. The built-in heater ensures high in-plane temperature uniformity and contributes to the semiconductor manufacturing processes that are required to support further miniaturization of semiconductors.