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Using an alumina ceramic body in which a heating element is buried then sintered onto the unit, these ceramic heaters can be made lightweight. In addition they excel in chemical resistance and in uniform temperature distribution. |
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Electrostatic Chucks (ESC) suitable for Si or GaAs materials, ranging from 300mm in Diameter. |
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Super flat Vacuum Chuck (V-Chuck) features 1Um surfaces (100nm in localized areas) with ultra-low particulation and minimal surface contact. |
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